Surface morphology during anisotropic wet chemical etching...

Surface morphology during anisotropic wet chemical etching of crystalline silicon

Gos lvez, M A, Nieminen, R M
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Volume:
5
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/5/1/400
Date:
July, 2003
File:
PDF, 4.61 MB
english, 2003
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