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[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - Repair technique for phase shifting masks using silicon-containing resist
Watanabe, H., Sigiura, E., Imoriya, T., Todokoro, Y., Inoue, M.Year:
1992
Language:
english
DOI:
10.1109/vlsit.1992.200675
File:
PDF, 371 KB
english, 1992