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Charged-species profiles in electronegative radio-frequency plasmas
Vender, D., Stoffels, W. W., Stoffels, E., Kroesen, G. M. W., de Hoog, F. J.Volume:
51
Language:
english
Journal:
Physical Review E
DOI:
10.1103/physreve.51.2436
Date:
March, 1995
File:
PDF, 427 KB
english, 1995