Ab Initio Identification of the Nitrogen Diffusion Mechanism in Silicon
Stoddard, Nathan, Pichler, Peter, Duscher, Gerd, Windl, WolfgangVolume:
95
Language:
english
Journal:
Physical Review Letters
DOI:
10.1103/physrevlett.95.025901
Date:
July, 2005
File:
PDF, 267 KB
english, 2005