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[IEEE 2008 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2008.12.15-2008.12.17)] 2008 IEEE International Electron Devices Meeting - Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
Lim, Andy Eu-Jin, Jian Hou,, Dim-Lee Kwong,, Yee-Chia Yeo,Year:
2008
Language:
english
DOI:
10.1109/iedm.2008.4796606
File:
PDF, 538 KB
english, 2008