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[Japan Soc. Appl. Phys 2003 Symposium on VLSI Circuits. Digest of Technical Papers - Kyoto, Japan (12-14 June 2003)] 2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408) - 3-dimensional vertical parallel plate capacitors in an SOI CMOS technology for integrated RF circuits
Jonghae Kim,, Plouchart, J.-O., Zamdmer, N., Sherony, M., Liang-Hung Lu,, Yue Tan,, Meeyoung Yoon,, Jenkins, K.A., Kumar, M., Ray, A., Wagner, L.Year:
2003
Language:
english
DOI:
10.1109/vlsic.2003.1221153
File:
PDF, 416 KB
english, 2003