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[IEEE 2007 International Workshop on Junction Technology - Kyoto, Japan (2007.06.8-2007.06.9)] 2007 International Workshop on Junction Technology - Arsenic Diffusion in strained Si/relaxed Si1-xGex and its electrical characteristics
Sumitomo, Takamichi, Matsumoto, SatoruYear:
2007
Language:
english
DOI:
10.1109/iwjt.2007.4279949
File:
PDF, 999 KB
english, 2007