The Impact of Double Bonds in the APPECVD of Acrylate-Like...

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Plasma Processes and Polymers 2013 / 07

The Impact of Double Bonds in the APPECVD of Acrylate-Like Precursors

Batan, Abdelkrim, Nisol, Bernard, Kakaroglou, Alexandros, De Graeve, Iris, Van Assche, Guy, Van Mele, Bruno, Terryn, Herman, Reniers, François
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Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201300054
Date:
July, 2013
File:
PDF, 702 KB
english, 2013
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