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[IEEE 2005 IEEE VLSI-TSA. International Symposium on VLSI Technology (VLSI-TSA-TECH) - Hsinchu, Taiwan (25-27 April 2005)] IEEE VLSI-TSA International Symposium on VLSI Technology, 2005. (VLSI-TSA-Tech). - Ultra-thin SOI replacement gate CMOS with ALD TaN / high-k gate stack
Doris, B., Linder, B., Narayanan, T.V., Callegari, S., Gousev, E., Park, D.G., Settlemyer, K., Jamison, P., Boyd, D., Li, Y., Hagan, J., Staendert, T., Mezzapelli, J., Dobuzinsky, D., Guarini, K., JamYear:
2005
Language:
english
DOI:
10.1109/vtsa.2005.1497095
File:
PDF, 407 KB
english, 2005