Fabrication of free-standing porous silicon microstructures

Journal of Micromechanics and Microengineering 2007 / 07 Vol. 17; Iss. 7

Fabrication of free-standing porous silicon microstructures

Garel, O, Breluzeau, C, Dufour-Gergam, E, Bosseboeuf, A, Belier, B, Mathet, V, Verjus, F
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/s13
Date:
July, 2007
File:
PDF, 620 KB
english, 2007
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