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[IEEE 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, HI, USA (18-21 Aug. 2003)] 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes
Chuan Pu,, Sangtae Park,, Chu, P., Shi-Sheng Lee,, Peale, D., Bonadeo, N., Brener, I.Year:
2003
Language:
english
DOI:
10.1109/omems.2003.1233500
File:
PDF, 281 KB
english, 2003