[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (19-22 May 1997)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Study of plasma chemistry in plasma doping processes
Shu Qin,, Yuanzhong Zhou,, Chung Chan,, Jiqun Shao,, Denholm, S.Year:
1997
Language:
english
DOI:
10.1109/plasma.1997.604448
File:
PDF, 105 KB
english, 1997