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[IEEE ASDAM'02 (4th International Conference on Advanced Semiconductor Devices and Microsystems) - Smolenice Castle, Slovakia (14-16 Oct. 2002)] The Fourth International Conference on Advanced Semiconductor Devices and Microsystem - Photoenhanced wet etching of gallium nitride on submicrometer scale
Skriniarova, J., van der Hart, A., Bochem, H.P., Fox, A., Kordos, P.Year:
2002
Language:
english
DOI:
10.1109/asdam.2002.1088525
File:
PDF, 165 KB
english, 2002