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[IEEE 2010 34th International Electronics Manufacturing Technology Conference (IEMT) - Melaka, Malaysia (2010.11.30-2010.12.2)] 2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT) - Wafer sort yield improvement by localizing and applying optical proximity correction on a metal bridging issue
Dumlao, Russell M., Ulland, Karsten P., Marcos, Ma. Shiela Angeli C., Beasterfield, DavidYear:
2010
Language:
english
DOI:
10.1109/iemt.2010.5746702
File:
PDF, 2.61 MB
english, 2010