Microcantilevers as gas-phase sensing platforms: Simplification and optimization of the production of polymer coated porous-silicon-over-silicon microcantilevers
Meltzman, Shai, Shemesh, Ariel, Stolyarova, Sara, Nemirovsky, Yael, Eichen, YoavVolume:
52
Language:
english
Journal:
Journal of Polymer Science Part B: Polymer Physics
DOI:
10.1002/polb.23405
Date:
January, 2014
File:
PDF, 472 KB
english, 2014