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Mechanism of platinum-enhanced oxidation of silicon at low temperatures
Kobayashi, Hikaru, Yuasa, Toshiro, Yamanaka, Kazuhiro, Yoneda, Kenji, Todokoro, YoshihiroVolume:
109
Year:
1998
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.477112
File:
PDF, 340 KB
english, 1998