An Auger electron spectroscopy/electron energy-loss spectroscopy study on the oxidation of WSi2 thin film
He, Jian-WeiVolume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.574620
Date:
July, 1987
File:
PDF, 501 KB
english, 1987