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[IEEE 2008 IEEE International Frequency Control Symposium - Honolulu, HI (2008.05.19-2008.05.21)] 2008 IEEE International Frequency Control Symposium - Effect of Mo layer on performance of AlN/Si SAW filter
Hoang, Trang, Rey, Patrice, Vaudaine, Marie-Helene, Robert, Philippe, Benech, PhilippeYear:
2008
Language:
english
DOI:
10.1109/freq.2008.4623073
File:
PDF, 631 KB
english, 2008