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[IEEE 2010 International Conference on Actual Problems of Electron Devices Engineering (APEDE 2010) - Saratov (2010.09.22-2010.09.23)] 2010 International Conference on Actual Problems of Electron Devices Engineering - Investigation of nanolayers' properties generated on Si surface in H2O
Bilenko, D I, Belobrovaya, O Ya, Malyar, I V, Mel'nikova, T E, Mysenko, I B, Polyanskaya, V P, Terin, D VYear:
2010
Language:
russian
DOI:
10.1109/apede.2010.5624036
File:
PDF, 48 KB
russian, 2010