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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - A DC-powered, tunable, fully mechanical oscillator using in-plane electrothermal actuation
Udeshi, K., Gianchandani, Y.B.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290632
File:
PDF, 347 KB
english, 2004