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[IEEE APEC 97 - Applied Power Electronics Conference - Atlanta, GA, USA (23-27 Feb. 1997)] Proceedings of APEC 97 - Applied Power Electronics Conference - Electrical modeling of HF coupled inductors supplying a double frequency inductive plasma reactor
Colpo, P., Ernst, R., Keradec, J.-P.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/apec.1997.575759
File:
PDF, 604 KB
english, 1997