Study of a micro chamber quadrupole mass spectrometer

Study of a micro chamber quadrupole mass spectrometer

Wang, Jinchan, Zhang, Xiaobing, Mao, Fuming, Xiao, Mei, Cui, Yunkang, den Engelsen, Daniel, Lei, Wei
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Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2827512
File:
PDF, 685 KB
english, 2008
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