GaAs to InP wafer fusion

GaAs to InP wafer fusion

Ram, R. J., Dudley, J. J., Bowers, J. E., Yang, L., Carey, K., Rosner, S. J., Nauka, K.
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Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359884
File:
PDF, 1.93 MB
english, 1995
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