[IRE 1978 International Electron Devices Meeting - ()] 1978 International Electron Devices Meeting - The use of silver halide emulsion as a resist
Marcus, R.B., Shankoff, T., Smith, D., Capio, C.D., Retajczyk, T.F., Timko, A.Year:
1978
Language:
english
DOI:
10.1109/iedm.1978.189485
File:
PDF, 386 KB
english, 1978