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Stability of ultrathin amorphous carbon films deposited on smooth silicon substrates by radio frequency sputtering
Lu, W., Komvopoulos, K., Yeh, S. W.Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1330248
File:
PDF, 1.07 MB
english, 2001