![](/img/cover-not-exists.png)
Rotation magnet sputtering: Damage-free novel magnetron sputtering using rotating helical magnet with very high target utilization
Goto, Tetsuya, Matsuoka, Takaaki, Ohmi, TadahiroVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3139903
File:
PDF, 999 KB
english, 2009