Rotation magnet sputtering: Damage-free novel magnetron...

Rotation magnet sputtering: Damage-free novel magnetron sputtering using rotating helical magnet with very high target utilization

Goto, Tetsuya, Matsuoka, Takaaki, Ohmi, Tadahiro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3139903
File:
PDF, 999 KB
english, 2009
Conversion to is in progress
Conversion to is failed