Potential of acoustic imaging in the detection of nanometer gaps
Tohmyoh, Hironori, Saka, Masumi, Hirayama, HayatoVolume:
53
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2006.196
Date:
December, 2006
File:
PDF, 303 KB
english, 2006