Emission Factors of Air Toxics from Semiconductor...

Journal of the Air & Waste Management Association (1995-) 2006 / 11 Vol. 56; Iss. 11

Emission Factors of Air Toxics from Semiconductor Manufacturing in Korea

Eom, Yun-Sung, Hong, Ji-Hyung, Lee, Suk-Jo, Lee, Eun-Jung, Cha, Jun-Seok, Lee, Dae-Gyun, Bang, Sun-Ae
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Volume:
56
Language:
english
Journal:
Journal of the Air & Waste Management Association
DOI:
10.1080/10473289.2006.10464556
Date:
November, 2006
File:
PDF, 779 KB
english, 2006
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