![](/img/cover-not-exists.png)
Thermal and Si-beam assisted desorption of SiO2 from silicon in ultrahigh vacuum
Streit, D. C., Allen, F. G.Volume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.337833
File:
PDF, 625 KB
english, 1987