Bulk wave membrane quartz resonators fabricated by a hollow...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1993 / 07 Vol. 40; Iss. 4

Bulk wave membrane quartz resonators fabricated by a hollow cathode RF plasma etching technique

Yankov, D.Y., Schreiter, S.
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Volume:
40
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.251296
Date:
July, 1993
File:
PDF, 350 KB
english, 1993
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