[IEEE 2007 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems - Long Beach, CA, USA (2007.01.10-2007.01.12)] 2007 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems - Investigation of Stiction Effect in Electrostatic Actuated RF MEMS Devices
Melle, S., Bordas, C., Dubuc, D., Grenier, K., Vendier, O., Muraro, J.L., Cazaux, J.L., Plana, R.Year:
2007
Language:
english
DOI:
10.1109/smic.2007.322787
File:
PDF, 3.65 MB
english, 2007