Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation
Izawa, Yusaku, Izawa, Yasukazu, Setsuhara, Yuichi, Hashida, Masaki, Fujita, Masayuki, Sasaki, Ryuichiro, Nagai, Hiroyuki, Yoshida, MakotoVolume:
90
Year:
2007
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2431709
File:
PDF, 340 KB
english, 2007