Vibration maps of capacitive micromachined ultrasonic...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2002 / 03 Vol. 49; Iss. 3

Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

Caronti, A., Majjad, H., Ballandras, S., Caliano, G., Carotenuto, R., Iula, A., Foglietti, V., Pappalardo, M.
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Volume:
49
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.990937
Date:
March, 2002
File:
PDF, 1.60 MB
english, 2002
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