[IEEE 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Cambridge, MA, USA (2008.05.5-2008.05.7)] 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Pursuing the Increase of Factory Automation in 200mm Frontend Manufacturing to Manage the Changes Imposed by the Transitionfrom High-Volume Low-Mix to High-Mix Low-Volume Production

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