Analysis of x-ray diffraction as a probe of interdiffusion...

Analysis of x-ray diffraction as a probe of interdiffusion in Si/SiGe heterostructures

Aubertine, D. B., Ozguven, N., McIntyre, P. C., Brennan, S.

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Volume:

Year:

2003

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.1589600

File:

PDF, 468 KB

english, 2003

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