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Decomposition and Analysis of Process Variability Using Constrained Principal Component Analysis
Cho, Choongyeun, Kim, Daeik D., Kim, Jonghae, Plouchart, Jean-Olivier, Lim, Daihyun, Cho, Sangyeun, Trzcinski, RobertVolume:
21
Year:
2008
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.913192
File:
PDF, 1.22 MB
english, 2008