[IEEE 1993 IEEE International SOI Conference - Palm Springs, CA, USA (5-7 Oct. 1993)] Proceedings of 1993 IEEE International SOI Conference - Enhanced chemical etching and optical observation: a quality analysis technique for industrial SIMOX production
Garcia, A., Aspar, B., Margail, J., Pudda, C.Year:
1993
Language:
english
DOI:
10.1109/soi.1993.344601
File:
PDF, 246 KB
english, 1993