[IEEE Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Honolulu, HI, USA (2004.06.17-2004.06.17)] Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Stress memorization technique (SMT) by selectively strained-nitride capping for sub-65nm high-performance strained-Si device application
Chien-Hao Chen,, Lee, T.L., Hou, T.H., Chen, C.L., Chen, C.C., Hsu, J.W., Cheng, K.L., Chiu, Y.H., Tao, H.J., Jin, Y., Diaz, C.H., Chen, S.C., Liang, M.-S.Year:
2004
Language:
english
DOI:
10.1109/vlsit.2004.1345390
File:
PDF, 186 KB
english, 2004