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[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Maneuvering Pull-in Voltage of an Electrostatic Micro-switch by Introducing a Pre-charged Electrode

Yang, Hyun-Ho, Lee, Jeong Oen, Yoon, Jun-Bo
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Year:
2007
Language:
english
DOI:
10.1109/iedm.2007.4418967
File:
PDF, 3.76 MB
english, 2007
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