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[IEEE 2013 6th International Conference on Advanced Infocomm Technology (ICAIT) - Hsinchu, Taiwan (2013.07.6-2013.07.9)] 2013 6th IEEE/International Conference on Advanced Infocomm Technology (ICAIT) - Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma
Kaneko, Satoru, Ito, Takeshi, Yasui, Manabu, Kurouchi, Masahito, Torii, Hironori, Amazawa, Takao, Tikumasu, Takashi, Nagano, Takatoshi, Seughwan, Lee, Park, Sungkyun, Takikawa, HirofumiYear:
2013
Language:
english
DOI:
10.1109/icait.2013.6621498
File:
PDF, 210 KB
english, 2013