[IEEE 1991 IEEE International SOI Conference - Vail Valley, CO, USA (1-3 Oct. 1991)] 1991 IEEE International SOI Conference Proceedings - An analytic solution to SIMOX oxygen implant profiles using joined half-Gaussian distributions
Hosack, H.H., Hollingsworth, J., Joyner, K., El-Ghor, M.Year:
1991
Language:
english
DOI:
10.1109/soi.1991.162914
File:
PDF, 130 KB
english, 1991