Single Phosphorus Ion Implantation into Prefabricated...

Japanese Journal of Applied Physics 2003 / 6 Vol. 42; Iss. Part 1, No

Single Phosphorus Ion Implantation into Prefabricated Nanometre Cells of Silicon Devices for Quantum Bit Fabrication

Yang, Changyi, Jamieson, David N., Pakes, Chris, Prawer, Steven, Dzurak, Andrew, Stanley, Fay, Spizziri, Paul, Macks, Linda, Gauja, Eric, Clark, Robert G.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.4124
Date:
June, 2003
File:
PDF, 215 KB
english, 2003
Conversion to is in progress
Conversion to is failed