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[IEEE 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Monterey, CA, USA (17-20 March 1997)] 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Measurement and characterization of multi-layered interconnect capacitance for deep submicron VLSI technology
Dae-Hyung Cho,, Man-Ho Seung,, Nam-Ho Kim,, Hun-Sup Park,, Jae-Kyung Wee,, Young-June Park,, Hong-Shik Min,Year:
1997
Language:
english
DOI:
10.1109/icmts.1997.589346
File:
PDF, 413 KB
english, 1997