X-ray lithography at the VEPP-3 storage ring
Artamonova, L. D., Gentselev, A. N., Deis, G. A., Krasnoperova, A. A., Mikhalyov, E. V., Prokopenko, V. S., Kulipanov, G. N., Mezentseva, L. A., Pindyurin, V. F.Volume:
63
Year:
1992
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1142656
File:
PDF, 578 KB
english, 1992