The connection between hydrodynamic stability of gas flow...

Journal of Applied Physics 1995 Vol. 77; Iss. 6

The connection between hydrodynamic stability of gas flow in spin coating and coated film uniformity

Öztekin, Alparslan, Bornside, David E., Brown, Robert A., Seidel, Philip K.
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Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.358751
File:
PDF, 1.73 MB
english, 1995
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