Simulation of asymmetric doped high performance silicon on...

Simulation of asymmetric doped high performance silicon on insulator metal oxide semiconductor field effect transistors for very large scale integrated complementary metal oxide semiconductor technologies

Herrmann, Tom, Flachowsky, Stefan, Illgen, Ralf, Klix, Wilfried, Stenzel, Roland, Höntschel, Jan, Feudel, Thomas, Horstmann, Manfred
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3292643
File:
PDF, 522 KB
english, 2010
Conversion to is in progress
Conversion to is failed