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[IEEE 4th International Conference on ASIC - Shanghai, China (23-25 Oct. 2001)] ASICON 2001. 2001 4th International Conference on ASIC Proceedings (Cat. No.01TH8549) - The selection and creation of the rules in rules-based optical proximity correction
Rui Shi,, Yici Cai,, Xianlong Hong,, Weimin Wu,, Changqi Yang,Year:
2001
Language:
english
DOI:
10.1109/icasic.2001.982496
File:
PDF, 320 KB
english, 2001