Direct measurement of diffusion coefficients of sputtered...

Journal of Applied Physics 1979 Vol. 50; Iss. 5

Direct measurement of diffusion coefficients of sputtered atoms in Ar

Mase, H., Tanabe, T., Miyamoto, G.
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Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326297
File:
PDF, 407 KB
english, 1979
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