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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Resonant properties of piezoelectric cantilever transducers fabricated on the SiC membrane
Park, Jae Hong, Choi, Kiyoung, Lee, Dong-Yeon, Shim, Jaesool, Kim, Tae SongYear:
2011
Language:
english
DOI:
10.1109/nems.2011.6017295
File:
PDF, 185 KB
english, 2011