Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 3
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Tilting angle of nanocolumnar films fabricated by oblique angle deposition
Zhu, Hao, Cao, Wei, Larsen, George K., Toole, Ryan, Zhao, YipingVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4710999
File:
PDF, 1.56 MB
english, 2012